6 The fragments of the molecules are either locally deposited or are volatilized and removed by the vacuum pumps. Using a focused electron beam, the primary, secondary, and backscattered electrons interact with the adsorbed precursor, which can lead to the dissociation of the molecules. Once attached, these molecules diffuse on the surface for a finite time which is on the order of the mean residence time 5 due to a finite probability of surface desorption. A capillary tube continuously supplies gaseous precursor molecules to the surface, where a fraction of the impinging flux physisorbs on the substrate surface. Precursor delivery systems are a common accessory deployed on FIB-SEM (focused ion beam/focused electron beam microscope), explaining why a large number of the FEBID experiments reported in the literature are conducted on these platforms. Local precursor delivery is another critical aspect of FEBID. The nanoscale resolution characteristic of the focused electron beam in an SEM is a critical component required for “nano” printing. In the FEBID application, the focused electron beam is used as the writing tool. 2–4įocused electron beam induced deposition is an additive manufacturing technology made possible by the scanning electron microscope (SEM) platform. ![]() Further 3D nanoprinted architectures can be found in the literature. 1 shows 3D nano-objects fabricated via FEBID, demonstrating reproducibility and the feasibility to direct-write highly complex 3D-geometries with structural dimensions on the nanoscale. The smallest structural dimensions (typically about 20–60 nm) are possible with a technique called focused electron beam induced deposition (FEBID). Even smaller features can be achieved using focused electron/ion beams. 1 While each technique has its individual strengths and weaknesses, the smallest possible feature size is limited by the size of the fabrication tool, e.g., inner diameter of the capillary or the wavelength of the laser light. 1 Others are based on chemical reduction of metal salt solution like meniscus-confined electroplating, electroplating of locally dispensed ions in liquid, or laser-induced photoreduction. Some of the mentioned techniques directly transfer nanoparticles to the substrate like direct ink writing, electrohydrodynamic printing, or laser-assisted electrophoretic deposition. 1 compared different additive manufacturing methods for metallic 3D objects. There are few technologies that can be used to print 3D objects with single structure sizes below 1 μm. As a perspective, we also address the most urgent milestones of the future and speculate on applications ranging from optics to mechanics, magnetics, and electronics, all of them benefiting from the recently improved 3D FEBID synthesis technique. In addition, we share our outlook about possible solutions and studies currently under investigation. For each aspect, the individual challenges and limitations are discussed. ![]() Here, we examine different aspects of 3D nanoprinting such as the instrumental setup, fundamental growth mechanisms, simulations, computer aided design software solutions, material properties, and application studies. ![]() This perspective article first introduces the basic principles of 3D-FEBID, followed by an overview of historical developments with a particular emphasis on the last three years. ![]() Among the pool of nanofabrication techniques, focused electron beam induced deposition (FEBID) has recently developed from a trial-and-error laboratory method to a predictable 3D nanoprinting technology with unique advantages. Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant topic but still a highly challenging task.
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